The coordinates of the meter,From the metering station3aluminum reference plane(Retroscope)Composition,By stabilizing frequenciesHe-NeLaser interference as a light source,YesXYZAxis,Here0.3nmResolution measure length.That's it,It will suppress the straight angle of the gauge,Impact of straightness,High-precision measurements.
| Main specification | |
|---|
| Brand | Panasonic |
| Model | Super-precision 3D meter |
| Type 1 | SMT Equipment |
| Type 2 | X-Ray Inspection Machine |
| Type 3 | AXI Inspection Equipment |
| Size | 1100mm*1230mm*1540mm |
| Weight | 750KG |
| Voltage | AC100V±5%/15A |
| Rated power | |
| Gas source | 0.5±0.05Mpa |
| Operating System | |
| Other | |
| Parameters | |
|---|
| Measurement range(X,Y,ZAxis)mm | 100*100*35 |
| Measure Settings Area(X,Y,ZAxis)mm | 200*200*110 |
| Survey probe | AFP／S-AFP |
| Resolution | 0.3nm |
| Maximum tilt angle measured on top surface | 75° |
| Measuring speed | 0.01~10mm/sec |
| Pressure source | 0.5Mpa~1.0Mpa Traffic150NL/min |
| Measurement accuracy based on an upper surface probe | 30°Below:±0.05μm(Round trip) 45°Below:±0.08μm(Round trip) 60°Below:±0.15μm(Round trip) 70°Below:±0.15μm(Down) |
